Research on technologies of micro-nano ceramic-based platinum rhodium 10-platinum thermocouple
Aiming at the technical problems of high temperature thermocouple in gas turbine temperature detection,such as large heat capacity,slow response time and inability to mount on the surface,a flexible chip substrate of 50 μm thickness is manufactured by ceramic micro-nano processing technology,and a platinum rhodium 10-platinum thermocouple electrode is with redundant structure formed by thin film process,and an all-ceramic sealed thermocouple is formed by sandwich packaging.The performance and function tests of micro-nano ceramic based high temperature thermocouple are carried out.The experiments show that the designed micro-nano ceramic based high temperature thermocouple has the characteristics of fast response,and can achieve the flexible surface mounting on the smooth surface.In the temperature range of 0～1 000 ℃,the output sensitivity of the thermocouple is compared with that of the secondary standard platinum rhodium 10-platinum thermocouple,the deviation is within±0.3％,and the response time of 90％is better than 0.1 s.The thermocouple has good high-temperature stability.
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