An integrated ceramic pressure sensor is designed and prepared.Firstly,the sensitive structure of the sensor is modelled and simulated based on the working principle of capacitive pressure sensors and the theory of thin plate deformation.The designed signal conditioning circuit is integrated on a printed circuit board(PCB),which is tightly attached to the sensitive structure by conductive structure PIN pins,compression springs are used for pin connection.A process preparation flow for sensitive structure of sensor is also designed and the encapsulated sensor is studied and analyzed.The test results show that the sensitivity reaches 0.571 V/V/MPa at room temperature within the range of 0～1.4 MPa,non-linearity is less than 0.325％FS,the overall measurement error precision is±0.245％RH in the temperature range of-40～150 ℃,the sensor works stably in an environment of vibration and shock.
关键词
陶瓷/电容式压力传感器/集成/灵敏度/振动冲击
Key words
ceramic/capacitive pressure sensor/integrated/sensitivity/vibration and shock
维普
万方数据