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高分辨率光纤法珀传感器解调系统设计

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光纤法珀传感器的腔长测量精度取决于解调系统的分辨率,现有的解调系统的分辨率多大于10 nm,难以实现10 nm以内腔长变化的测量.针对该问题,提出了以7450像元数的线阵图像传感器为基础搭建解调系统,通过硬件设计与软件算法提高特征信号质量,完成腔长数据提取,实现了一种高分辨率光纤法珀传感器解调系统.实验结果表明,该系统在0~20μm的腔长测量范围内,实现了 2.7nm的光学分辨率,精度达到0.0135%FS.
Design of high resolution fiber Fabry-Perot sensor demodulation system
Measurement precision of cavity length of fiber Fabry-Perot sensors depends on the resolution of the demodulation system.Existing demodulation systems often have a resolution of greater than 10nm,which is difficult to measure changes in cavity length beyond 10 nm.Aiming at this issue,a demodulation system based on 7 450 pixel linear array image sensor is proposed,which improves the quality of feature signals through hardware design and software algorithms,completes cavity length data extraction,and implementes a high-resolution fiber Fabry-Perot sensor demodulation system.The experimental results show that the system achieves an optical resolution of 2.7 nm and an precision of 0.013 5%FS within the cavity length measurement range of 0~20 μm.

Fabry-Perot sensormeasurement precisiondemodulation systemcavity lengthhigh resolutionlinear array image sensor

景智鹏、万顺、贾平岗

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中北大学省部共建动态测试技术国家重点实验室,山西太原 030051

法珀传感器 测量精度 解调系统 腔长 高分辨率 线阵图像传感器

国家自然科学基金国家科技重大专项

52075505J2019-V-0015-0110

2024

传感器与微系统
中国电子科技集团公司第四十九研究所

传感器与微系统

CSTPCD北大核心
影响因子:0.61
ISSN:1000-9787
年,卷(期):2024.43(4)
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