Design and implementation of engineering silicon microresonant accelerometer
A design scheme of silicon microresonant accelerometer based on MEMS sensitive structure chip and application specific integrate circuit(ASIC)chip is proposed.The sensitive structures mainly include sensitive mass,one-stage microlever amplification structure and double-ended tuning fork resonator.The overall structure adopts left-right difference symmetrical layout to achieve high sensitivity.The sensitive structure chip is fabricated by the silicon wafer-level packing technology,which can realize the sensitive structure chip with low stress and batch processing.The sensitive structure chip and ASIC chip are integrated in package with stacking form to achieve miniaturization and low power consumption.The resonant frequency of the designed accelerometer is about 18.2 kHz,The range is±20gn,the scale factor is 216 Hz/gn,scale factor stability is 5 ×10-6,and the zero bias stability is 6.5 μgn(1 σ,10 s).The scheme realizes the device with miniaturization,low power consumption and integration.
万方数据
维普
