Research on manufacturing method of sensitive components based on conductive-island system
Based on the conductive-island microelectrode system with a characteristic angle of 60°.Generation of gold nanoparticles driven by AC dielectrophoresis(DEP)at low-frequency is explored.Firstly,conductive-island microelectrode system is fabricated by lift-off process with a characteristic angle of 60°.Dielectrophoretic assembly experiments of nanoparticles are carried out based on this system.It is found that nanoparticles will form short chains or clusters structure of nanoparticles in low-frequency range.Then,based on the electric double-layer theory,the influence of alternating current electroosmosis(ACEO)on electrokinetic fluid at low-frequency is analyzed.It is found that the electric double-layer phenomenon at low-frequency can weaken the electric field and dielectrophoretic flow in electrokinetic fluid to a certain extent.Finally,based on analysis of the particle trajectory with the driving frequency of 100 kHz,it is found that this situation is more likely to produce nanoparticle clusters,which is in good agreement with the experimental phenomenon.
conductive-island microelectrode systemcharacteristic angle 60°dielectrophoretic assembly behavioralternating current electroosmosis(ACEO)