首页|基于热电堆的微型热流传感器制备及性能研究

基于热电堆的微型热流传感器制备及性能研究

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航空发动机内部温度和热辐射的不均匀分布可能导致叶片表面出现热点,引起叶尖等区域的材料损坏.因此,监测单位时间内通过叶片表面的热量十分重要.热电堆型热流传感器以其测量范围广、稳定性好、精度高等优点,成为监测高温环境热流参数的常用方法.本文采用丝网印刷和高温烧结工艺,在10mm×10mm×1mm的99%Al2 O3 陶瓷基片上制备了Pt-Rh10/Pt热电堆型热流传感器,并搭建了热流实验平台对传感器进行测试.结果表明,该热流传感器在1 019.4℃的高温环境下,所测热流密度为179.67 kW/m2,输出电压为0.4623mV.经过3 次热循环测试可知,该热流传感器的重复性偏差小于5%,具有较好的重复性.
Preparation and performance study of miniature heat flux sensor based on thermopile
The non-uniform distributions of temperature and thermal radiation inside aero-engine may lead to hot spots on the blade surface,causing material damage in regions such as the blade tip.Therefore,it is very important to monitor the heat passing through the blade surface per unit time.Thermopile-type heat flux sensor has become a common method for monitoring the heat flow parameter in high-temperature environment due to its advantages such as wide measurement range,good stability,and high precision.A Pt-Rh10/Pt thermopile-type heat flux sensor is fabricated on a 99%Al2 O3 ceramic substrate of 10mm×10mm×1 mm by screen printing and high-temperature sintering process,and a heat flux experimental platform is built to test the sensor.The results show that the measured heat flux density is 179.67 kW/m2 and the output voltage of the heat flux sensor is 0.4623 mV at a high-temperature environment of 1019.4℃.After three thermal cycle tests,it can be seen that the repeatability deviation of the heat flux sensor is less than 5%,and it has a good repeatability.

high temperature envionmentheat flux monitoringthermal resistance layerthermoelectric effectheat flux sensor

李晓芬、张香香、谭秋林

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中北大学微纳器件与系统教育部重点实验室,山西太原 030051

中北大学省部共建动态测试技术国家重点实验室,山西太原 030051

高温环境 热流监测 热阻层 热电效应 热流传感器

2024

传感器与微系统
中国电子科技集团公司第四十九研究所

传感器与微系统

CSTPCD北大核心
影响因子:0.61
ISSN:1000-9787
年,卷(期):2024.43(5)
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