Research and fabrication on MEMS magnetoelectric vector hydrophone
A vector hydrophone based on magnetoelectric(ME)effect and MEMS technology is proposed.The MEMS sensitive detection unit of vector hydrophone includes ME material,the MEMS component of eight cantilever beams-center mass block,and permanent magnets.This article uses a charge amplification signal processing circuit to process signals generated by sensitive detection units.By designing ME material,MEMS component and signal processing circuits,makes the vector hydrophones having high sensitivity during operation.The preparation of vector acoustic sensor is completed through acoustic potting,and the performance of vector hydrophone are tested.The test results indicate that the receiving sensitivity of the vector hydrophone is-180 dB(0dBre1 V/μPa)(@1000 Hz).
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