基于硅酸镓镧高温压电剪切加速度计的设计与制备
Design and preparation of high-temperature piezoelectric shear accelerometer based on LGS
李爽 1程文华 1梁晓瑞 2谭秋林1
作者信息
- 1. 中北大学微纳器件与系统教育部重点实验室,山西太原 030051;中北大学省部共建动态测试技术国家重点实验室,山西太原 030051
- 2. 太原科技大学电子信息工程学院,山西太原 030051
- 折叠
摘要
随着航空航天、原子能技术、汽车电子、冶金与石油化工等工业的迅猛发展,迫切需要能够在高温环境下对振动、压力及噪声等进行监测的传感器.本文设计并制备了基于硅酸镓镧(LGS)压电单晶材料的压电加速度传感器.实验结果表明,该传感器的谐振频率约为3 kHz,在常温～800℃,工作频率为80～1000 Hz范围内,传感器的电荷灵敏度保持稳定,平均值为0.081 pC/gn.该传感器能在800℃高温下稳定工作.
Abstract
With the rapid development of aerospace,atomic energy technology,automotive electronics,metallurgy and petrochemical industries,there is an urgent need for sensors that can monitor vibration,pressure and noise in high temperature environments.A piezoelectric acceleration sensor based on Langasite(LGS)piezoelectric single crystal material is designed and prepared.The experimental results show that the resonance frequency of the sensor is about 3kHz,and the charge sensitivity of the sensor remains stable with an average value of 0.081pC/gn in the working range of 80～1000 Hz from room temperature to800℃.The sensor can work stably at800℃.
关键词
硅酸镓镧/压电加速度计/高温/COMSOL/固有频率Key words
Langasite(LGS)/piezoelectric accelerometer/high temperature/COMSOL/intrinsic frequency引用本文复制引用
基金项目
国家自然科学基金航天联合重点基金(U1837209)
出版年
2024
NETL
NSTL
万方数据