Humidity-sensitive material is prepared using hydrothermal synthesis methods.TiO2 and RGO-TiO2 nanofilms are coated on surfaces imprinted with micro-interdigited electrodes to construct humidity-sensitive element.The morphology and structure of the sensitive material are characterized by field emission scanning electron microscopy(FESEM)and X-ray diffractometer(XRD).Various electrical parameters variation of the film are measured with humidity,and their impedance characteristics are analyzed.The results show that at room temperature,the sensitivity of TiO2 composite material with 0.2％RGO is as high as 0.135 MΩ/％RH,and the hysteresis is relatively small.The response time of the humidity sensor is 50 s,and the recovery time is 76 s.Multiple measurement results show that the sensor has good repeatability and stability.
关键词
湿度传感器/二氧化钛/还原氧化石墨烯/湿敏材料
Key words
humidity sensor/TiO2/reduced graphene oxide(RGO)/humidity-sensitive material
万方数据