FEA and design of 1 mm cylindrical piezoelectric micro-actuator
A piezoelectric micro-actuator with diameter of 1 mm and length of 5mm is developed to drive and control the prototype of optical coherence tomography(OCT)endoscope. The stator is modeled and simulated by finite element analysis (FEA )software and the effects of material parameters and structural dimensions on the stator vibration characteristics and modal frequency are studied. The research results show that the first order bending vibration frequency of the micro actuator stator is 21kHz,the resonant frequency of the stator decreases sharply with the increase of the length of the stator and increases with the increase of the thickness of the ceramic.In addition,the material properties and thickness of the bonding layer have little influence on the modal frequency, but have a great influence on the vibration characteristics of stator. When the excitation voltage is 100 V and frequency is 21kHz,the no-load speed of the micro actuator reaches 400 r/min,and the stall torque is 2.5 mN·m. It basicly meets the application requirements of OCT endoscope.
vibration characteristicsfinite element modelintegrated statorbonding layer
万方数据
维普
