Research on frequency modulation technology of double decoupling MEMS gyroscope based on ultrashort pulse laser etching
Dual-decoupling dual-mass silicon micro-gyroscope is taken as research target. Start from the microstructure,its working principle and double decoupling motion model are analyzed,and the factors which affect mode characteristic frequency are proposed. A method changing the thickness of gyroscope elastic beam structure to adjust its characteristic frequency is proposed,establish a model,influence relation of gyroscope beam thickness change on characteristic frequency is simulated by Comsol software,and the picosecond(ps)laser etching system is chosen to etch thickness of gyroscope elastic beam,test its two-mode characteristic frequency. Test result shows tha the corresponding frequency change conforms to the theoretical derivation and simulation trend.
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