Electromechanical coupling characteristics of all-metal solid-state vibrating gyroscope (ASVG )is studied.A detection method for simulating electrostatic excitation of ASVG using multi-physics field finite element simulation is proposed,the influence of different driving mode on electrostatic driving force is analyzed according to the principle of electrostatic drive and detection principle,the electrode structural parameters are optimized,and the static error of the detection capacitor is obtained.The results show that the amplitude of the ASVG is proportional to the applied AC voltage and DC bias,and under the driving voltage of double resonant frequency,its amplitude is up to the maximum of 4.5μm,and it is excited to the four-wave belly state,the optimized electrode angle is 40°,and the distance between the electrostatic electrode and the vibrator is maintained at 5μm.The maximum amplitude is 2.3μm,which basically meets the design requirements.Finally,the amplitude-frequency characteristics and electromechanical characteristics of the ASVG are obtained through experiments,which verifies the correctness and usability of the analysis results.
关键词
全金属固态振动陀螺/金属振子/有限元仿真
Key words
all-metal solid state vibrating gyro/metal oscillator/finite element simulation
维普
万方数据