Research on design and preparation technology of DLC film conductive material
When the sensor is working,the brush and the resistor are always in the state of sliding contact and friction.Long-term work will cause the coated resistance thin film to wear seriously,which will directly affect the service life of the sensor.In order to improve the reliability of the sensor and enhance the wear resistance of the resistive sensing element of the sensor,a design and preparation process technology of diamond-like carbon(DLC) film conductive material is proposed.The dual-target co-sputtering process is used on Al2 O3 substrate ceramic,and the uniform and dense diamond-like film is obtained by accurately controlling the sputtering conditions,which meets the requirements of high precision and miniaturization,and enhances the stability of the heterogeneous materials for long-term work at the same time.
万方数据
维普
