The main function of the planar coil in giant magnetoresistive (GMR)isolator is to convert electric signal into magnetic signal,in order to determine the specific parameters of the planar coil,scanning analysis of magnetic field influence parameters of planar coils in GMR isolator structures is carried out.Based on Ansys Maxwell/2D,the input current of the GMR isolator is determined as 5.94 mA,combined with the existing process conditions line width,line spacing,and thickness of the planar coil are determined as 5μm,2 μm,and 2μm,respectively,and the coil center distance is 100μm.Further more,the 3D model of the planar coil is established using Maxwell/3D and the magnetic field strength under a static magnetic field is analyzed.The planar coil produces a magnetic field strength of about 4.18 Oe at the 13μm thickness of SiO2 barrier directly below it,which meets the requirements of the fabrication of GMR isolators,and provide a reference for the planar coil of the GMR isolator.
关键词
巨磁阻隔离器/平面线圈/Ansys/Maxwell/静磁场/磁场强度
Key words
giant magnetoresistance(GMR)isolator/planar coil/Ansys Maxwell/static magnetic field/magnetic field strength
维普
万方数据