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用于人体运动监测的微球结构柔性压力传感器

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针对微结构柔性压力传感器的工艺复杂和高灵敏度压力区间小等问题,本文提出了一种基于微米(μm)级金属铜(Cu)微球结构的柔性可穿戴式压力传感器,用于人体运动信号的个性化监测.该传感器利用Cu微球的高导电性及其丰富的表面形态在硅胶表面构造了一层独特的摩擦结构,与聚对苯二甲酸乙二醇酯(PET)薄膜进行摩擦,增大了摩擦系数,提高了灵敏度和稳定性.柔性材料的应用使其能够适应人体皮肤曲面,实现高效的压力检测.该传感器具有28.7 nA/kPa的压力灵敏度,能响应0~20 Hz压力,并且在工作1000个周期后仍具有良好的稳定性.
Microsphere-structure flexible pressure sensor for human motion monitoring
To address the issues of complex fabrication processes and small high-sensitivity pressure ranges of microstructured flexible pressure sensors,a flexible wearable pressure sensor based on microscale metallic copper (Cu)microsphere structure is proposed for personalized monitoring of human motion signals.The sensor utilizes the high conductivity of Cu microspheres and rich surface morphology to construct an unique frictional structure on the surface of silicone.This structure,when rubbed against a polyethylene terephthalate(PET)film,increases the friction coefficient,thereby enhancing sensitivity and stability.The application of flexible materials allows the sensor to conform to the curved surfaces of human skin,enabling efficient pressure detection.The sensor has a pressure sensitivity of 28.7 nA/kPa,which can response to pressures in the range of 0~20 Hz,and maintains good stability after 1000 cycles of operation..

flexible pressure sensormicron-sized coppermicrosphere structurewearable

宋锐、罗海军、王雪

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重庆师范大学物理与电子工程学院光电功能材料重庆市重点实验室,重庆401331

重庆师范大学重庆国家应用数学中心,重庆401331

柔性压力传感器 微米级金属铜 微球结构 可穿戴

国家级大学生创新创业训练计划国家自然科学基金重庆市自然科学基金(面上项目)资助项目重庆市教委科学技术研究计划重庆师范大学博士启动基金

20231063701351507023cstc2020jcyjmsxmX0726KJZD-K20210050623XLB014

2024

传感器与微系统
中国电子科技集团公司第四十九研究所

传感器与微系统

CSTPCD北大核心
影响因子:0.61
ISSN:1000-9787
年,卷(期):2024.43(8)