Micro-structure flexible pressure sensor based on magnetron sputtering technology
At present,it is still a huge challenge to explore wearable strain sensors with simple preparation process,low cost and excellent performance.A new type of flexible pressure sensor is prepared by using mold forming method to prepare the sensor substrate with microstructure,and combined with magnetron sputtering technology to construct the conductive thin film.The experimental results show that this method is beneficial to the combination of substrate and conductive material,so that making the sensor has greater deformation potential.Sensor sensitivity is improved(2.37 kPa-1 under 0～500 Pa)with rapid response recovery time (about 250 ms),good durability(1000 cycles tests)and very low minimum response limit (about 1.5 Pa).At the same time,the sensor can be used for human condition monitoring and can detect weak physiological signals such as heartbeat and pulse,which proves that the flexible pressure sensor has good application prospect in intelligent wearable devices.
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