Research on torr pressure sensor based on quartz crystal thin film
Based on quartz crystal thin film,direct bonding,Au-Au bonding,eutectic welding,and glass slurry sealing are carried out,including quartz crystal-quartz crystal,quartz crystal—609 metal double-layer sealing,quartz crystal three-layer sealing,and quartz crystal—609 metal multi-layers sealing.The sealing leakage rate is less than 1×10-13 Pa·m3/s,the strength reaches 10 MPa,and the warping is reduced to 3μm.Using quartz crystal as sensitive element and using MEMS processing technology to prepare quartz with electrode patterns,capacitive pressure sensor is made by sealing the quartz crystal film onto 609 metal through transfer.Zero drift of different sealing processes is tested,achieving a low vacuum measurement range of 0.001～0.1 mmHg with an accuracy of±0.6%within the measurement range.The long-term zero drift for 15 days is 0.8μmHg,with a drift level of 0.5%FS.By designing a"bow"shaped stress release structure on quartz crystals and using the same process mentioned above,capacitive pressure sensor is prepared,with a long-term zero drift level reduced to 0.06%FS after 15 days.
quartz crystalsthin film pressure sensorvacuum measurementlong term zero drift
万方数据
维普
