Aiming to dynamic presessure testing requirements of aero-engine in harsh and complex test environments,a systematic study on dynamic performance of silicon carbide(SiC)high-temperature pressure sensor from chip,packaging structure design,performance simulation,device fabrication process and dynamic performance testing of the sensors are carried out.The simulation results show that the frequency response of the sensor is 32.4 kHz and the rising time is 40 μs.The test results show that the frequency response of the sensor is not less than 5 kHz and the rising time is 93 μs.This sensor has characteristics of high dynamic response frequency and fast response to shock signals,providing technical support for the measurement of pulsating pressure in aero-engines.
关键词
航空发动机/碳化硅/高温压力传感器/动态性能/脉动压力测量
Key words
aero-engine/silicon carbide(SiC)/high temperature pressure sensor/dynamic performance/pulsation pressure measurement
维普
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