Dynamic performance study of SiC high temperature pressure sensor
Aiming to dynamic presessure testing requirements of aero-engine in harsh and complex test environments,a systematic study on dynamic performance of silicon carbide(SiC)high-temperature pressure sensor from chip,packaging structure design,performance simulation,device fabrication process and dynamic performance testing of the sensors are carried out.The simulation results show that the frequency response of the sensor is 32.4 kHz and the rising time is 40 μs.The test results show that the frequency response of the sensor is not less than 5 kHz and the rising time is 93 μs.This sensor has characteristics of high dynamic response frequency and fast response to shock signals,providing technical support for the measurement of pulsating pressure in aero-engines.
aero-enginesilicon carbide(SiC)high temperature pressure sensordynamic performancepulsation pressure measurement
万方数据
维普
