Structure design and simulation of MEMS micro-hotplate
As the basic structure of many MEMS sensors and actuators,micro-hot plates have a great impact on device performance and thus have important applications in many fields,such as gas sensors,fuel cells.Several micro-hot plates with different suspended membrane structures are proposed.Finite element analysis(FEA)method is used to simulate the micro-hot plates in terms of thermal stability,mechanical stability,power consumption and efficiency at the common operating temperature of 400℃ of gas sensors.The results show that the spiral-shaped micro-hot plate has better overall performance.Several parameters that may affect the performance of the micro-hot plate,such as electrode voltage,support layer thickness,and microheater line width,are further optimized,obtain graph structure and parameter design of micro-hotplate with the optimal comprehensive performance.
micro-hot platefinite element analysis methodMEMS sensorgas sensorlow pressure chemical vapor deposition