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MEMS微热板结构设计与仿真

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微热板作为很多微机电系统(MEMS)传感器和执行器的基础结构,对器件性能影响极大,在气体传感器、燃料电池等领域都有着重要的应用.本文提出了几种悬浮式结构的微热板设计,并利用有限元分析方法(FEA),在气体传感器常用的工作温度400℃下,从热稳定性、机械稳定性、功耗和效率多方面对微热板进行了仿真,结果表明:螺旋形微热板的综合性能更好.进一步对可能影响微热板性能的多个因素,如电极电压、支撑层厚度、微加热器线宽间距比等进行了优化,获得了综合性能最优的微热板图形及参数设计.
Structure design and simulation of MEMS micro-hotplate
As the basic structure of many MEMS sensors and actuators,micro-hot plates have a great impact on device performance and thus have important applications in many fields,such as gas sensors,fuel cells.Several micro-hot plates with different suspended membrane structures are proposed.Finite element analysis(FEA)method is used to simulate the micro-hot plates in terms of thermal stability,mechanical stability,power consumption and efficiency at the common operating temperature of 400℃ of gas sensors.The results show that the spiral-shaped micro-hot plate has better overall performance.Several parameters that may affect the performance of the micro-hot plate,such as electrode voltage,support layer thickness,and microheater line width,are further optimized,obtain graph structure and parameter design of micro-hotplate with the optimal comprehensive performance.

micro-hot platefinite element analysis methodMEMS sensorgas sensorlow pressure chemical vapor deposition

王玫、王旭丹、姜利英

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郑州轻工业大学电子信息学院,河南郑州 450002

郑州轻工业大学计算机科学与技术学院,河南郑州 450002

郑州轻工业大学量子科技研究院,河南郑州 450002

微热板 有限元分析方法 MEMS传感器 气体传感器 低压化学气相沉积

国家自然科学基金资助项目河南省重点研发与推广专项(科技攻关)项目中原科技创新领军人才项目

62073299242102210216224200510026

2024

传感器与微系统
中国电子科技集团公司第四十九研究所

传感器与微系统

CSTPCD北大核心
影响因子:0.61
ISSN:1000-9787
年,卷(期):2024.43(10)