A tactile sensor based on subwavelength metal grating interference is proposed because optical tactile sensors have the advantages of high sensitivity and strong interference resistance ablilty.Firstly,the sensing principle of the tactile sensor is introduced based on the equivalent medium theory and thin film interference theory.Then,subwavelength metal grating is fabricated on the surface of flexible intermediate polymer sheet(IPS)by nanoimprinting lithography process and vacuum evaporation coating process.The subwavelength metal grating is placed off-surface at a fixed pitch parallel to the grating by photolithography process with SU—8 photoresist,so that its transmitted light intensity changes with the application of contact force.Finally,a series of force loading experiments are conducted on the grating tactile sensor,and the experimental results show that the average force resolution of the tactile sensor can reach more than 0.0003 N/Gray,and the average measurement error is 6.3%.This tactile sensor may be used to realize the tactile sensing function on the manipulator by miniaturization design.
tactile sensorsubwavelength metal gratingnanoimprint lithographymanipulator
万方数据
维普
