Design and process study of MEMS electrostatic-actuated micromirror array
Based on MEMS processing,a 2D quasi-static driven micromirror array(MMA)used in optical communication field is designed and fabricated.Compared with the comb-drive micromirror,the electrostatic micromirror based on the parallel-plate capacitor is easier to form a high duty-factor array arrangement,which is beneficial to be used in all-optical switching as an optical switch matrix.By designing"vertical serpentine"biaxial torsion axis structure with a small coefficient of elasticity,effectively reduces the driving voltage of the micromirror,and the silicon-glass anodic bonding process is used to make the parallel plate capacitor structure,and the insulated glass is used as the electrode substrate to bond with the silicon device layer of a silicon on insulator(SOI)wafer,which not only achieves good electrical isolation,improves the stability of devices,but also is well compatible with the array expansion.The fabricated 1×4 micromirror array can realize 2-D quasi-static driving in the X/Y direction.The test results are approximately consistent with the finite element simulation results.The results show that the mechanical rotation angles of the inner and outer-axis of the micromirror can reach±2° at a DC voltage of 26.5 V and 29.5 V,respectively,and the response time of the micromirror is 5 ms.
万方数据
维普
