Simulation and optimization of capacitive pressure sensor based on Miura-ori
The sensitivity of the flexible capacitive pressure sensor usually attenuates with increasing pressure,which may affect its application in the case of environmental pressure.The flexible capacitive pressure sensor based on Miura-ori can improve the relative change rate of capacitance by changing the distance and the opposite area between electrodes at the same time due to its special folding mode.Variation law of sensitivity of the Miura-ori capacitive pressure sensor increases with increasing pressure is verified by finite element simulation.In addition,the capacitance variation of Miura-ori sensors with different initial dihedral angles and thicknesses under different pressures are simulated to optimize the performance from the structure.
flexible capacitive pressure sensorMiura-ori structuresensitivityfinite element simulation