首页|基于三浦折纸电容式压力传感器的仿真与优化

基于三浦折纸电容式压力传感器的仿真与优化

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柔性电容式压力传感器的灵敏度通常随压力的增加而衰减,这可能会影响其在具有环境压力情况下的应用.基于三浦折纸结构的柔性电容式压力传感器由于其特殊的折叠方式,可以同时改变电极之间的距离和正对面积来提高电容的相对变化率.本文通过有限元仿真验证了三浦折纸电容式压力传感器的灵敏度随压力的增加而增大的变化规律.此外,仿真了不同初始二面角和厚度的三浦折纸传感器在不同压力下的电容变化情况,从结构上进行性能优化.
Simulation and optimization of capacitive pressure sensor based on Miura-ori
The sensitivity of the flexible capacitive pressure sensor usually attenuates with increasing pressure,which may affect its application in the case of environmental pressure.The flexible capacitive pressure sensor based on Miura-ori can improve the relative change rate of capacitance by changing the distance and the opposite area between electrodes at the same time due to its special folding mode.Variation law of sensitivity of the Miura-ori capacitive pressure sensor increases with increasing pressure is verified by finite element simulation.In addition,the capacitance variation of Miura-ori sensors with different initial dihedral angles and thicknesses under different pressures are simulated to optimize the performance from the structure.

flexible capacitive pressure sensorMiura-ori structuresensitivityfinite element simulation

孙鸿、李木军

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中国科学技术大学精密机械与精密仪器系,安徽合肥 230026

柔性电容压力传感器 三浦折纸结构 灵敏度 有限元仿真

国家自然科学基金资助项目

51475442

2024

传感器与微系统
中国电子科技集团公司第四十九研究所

传感器与微系统

CSTPCD北大核心
影响因子:0.61
ISSN:1000-9787
年,卷(期):2024.43(10)