Optical leakage detection method of MEMS vacuum packaging based on cross center positioning algorithm
Typical optical leakage detection methods require image processing of the whole interferogram or even multiple interferograms,resulting in a complex process.In this paper,a simple and fast cross center positioning algorithm,which combines symmetrical characteristics and deformation distribution characteristics of MEMS device packaging structures.By determining coordinates of center point of interference pattern,light intensity distribution along the center line is obtained,further the profile of the sample along the center line can be determined through data fitting.Furthermore,the leakage rate is calculated by using the relative displacement of the center point of the packaging structure varies with vacuum degree.Taking circular packaging structure as an example,the paper demonstrates the feasibility of the method.
vacuum packaginglaser interferenceoptical leakage detectioncross center positioning method
万方数据
维普
