为实现软材料在微纳尺度的夹持与搓动等操作,提出了一种基于压电驱动的具有搓动夹持功能的微夹钳装置.基于桥式放大器和杠杆机构的联合放大作用,增大了压电陶瓷驱动器输出端有限行程.通过正交布置的柔性铰链机构,实现搓动与夹持两自由度方向上的运动解耦.对机构的放大倍数和刚度等参数,建立了理论建模,并进行了有限元分析,验证了设计的合理性.夹持方向和搓动方向的位移放大倍数分别为11.30和8.11,行程分别达到了225,162μm,第一阶固有频率为164.81 Hz.
Design and analysis of micro-gripper for soft material rubbing and clamping
In order to realize the rubbing and clamping operation of soft material at micro and nano scales,a micro-clamp device with rubbing and clamping function based on piezoelectric drive is proposed. Based on the combined amplification effect of the bridge amplifier and the lever mechanism,the limited travel of the output end of the piezoelectric ceramic driver is increased. Through the orthogonal flexible hinge mechanism,the motion decoupling in the direction of two degrees of freedom(2DOF)of rubbing and clamping is realized. The theoretical models for parameters such as magnification and stiffness of the mechanism are established,and the finite element analysis is carried out to verify the rationality of the design. The displacement magnifications factors of the clamping direction and the rubbing direction are 11.30 and 8.11,respectively,the strokes reach 225 μm and 162 μm,respectively. The first natural frequency is 164.81 Hz.
microgripperflexure hingepiezoelectric actuatorfinite element analysis
万方数据
维普
