Design of large stroke parallel 6-DoF micro-positioning platform
A six degree-of-freedom(6-DoF)micro-positioning platform is designed based on flexure hinge. The micro-platform has the advantages of large stroke and 6-DoF movement. The platform is driven by piezoelectric ceramics and the static analysis of displacement amplifier is carried out using the principle of virtual work. The performance analysis and modal analysis of the micro platform are carried out using Ansys finite element analysis(FEA)software. The micro-positioning platform is octagonal with side length of 16.5 mm. The motion stroke of the micro-positioning platform in direction XYZ is 272.94μm × 283.66μm × 312.29μm with the platform size of Φ150 ×5 mm3 . The platform plays an important role in precise positioning of micro-operations,and the stability of the platform is improved.
six degree-of-freedomlarge strokefinite elementflexible hinge
万方数据
维普
