Simulation and analysis of electromagnetic MEMS-VCSELs micro-structure
An electromagnetic-driven MEMS-VCSELs microstructure that integrates VCSEL arrays with MEMS micro-mirrors is presented. Wiring rules for rounded rectangular coils are provided,and Green's Theorem is used to solve the isothermal linear Reynolds equation. The theoretical model is established for the moment of inertia,damping coefficient,and other parameters of the moving plate with metal coils and VCSELs. Finite element model is built using Auto CAD and COMSOL software,considering the combined characteristics of each module in the microstructure and the effect of magnetic torque. Torsion characteristic of static torsion,resonant modes,harmonic response,and torsional stress of the microstructure are simulated in steady-state and frequency domains by adding material solid mechanics-related elements. The results show that the maximum static mechanical torsion angle of the microstructure under boundary loading is 3.02°. When the first-order mode is used as the working mode,the resonant frequency is 1.313 kHz,and the mechanical torsion angle in the resonant state can reach 42°,which is relatively independent of the adjacent higher-order modes. By extracting the stress distribution of the centerline of the torsion beam surface in the static and resonant states,the maximum stress value is less than the safe stress of a silicon-based straight torsion beam,indicating that the microstructure has good reliability.
MEMS-VCSELs micro-structureMEMS micro-mirrorLiDARfinite element simulation
万方数据
维普
