Design and Research of Micro Thermal Conductivity Detector Based on MEMS Technology
Thermal conductivity detector(TCD)is popular in gas chromatography detectors,it is widely used in the petrochemical,metuallugical,coal and other industries,TCD is an indispensable analysis tool.To analysis the qualitative and quantitative of analyte components,it's necessary to require gas analyzers of high sensitivity,fast response time,portable and other advantages.Micro thermal conductivity detector is the research object in the paper,several key technologies are involved in the research work.It includes working principle and working environment of a TCD,the choose of thermal elements,the research and production of the micro thermal conductivity detector's cell body material and structures,the design of a constant current source,temperature control system,the design and application of SCM data acquisition system to designed a high sensitivity,wide detection range and low-cost micro thermal conductivity detector.After the micro thermal conductivity detector arranged in a gas chromatograph,the data acquired by SCM was analyzed by chromatography workstation,the results show that the response speed has been significantly improved,and the measurement is more accurate and stable.
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