Abstract
NF3 is commonly used as an etching and cleaning gas in semiconductor industry,however it is a strongly greenhouse gas.Therefore,the destruction of disposal NF3 is an urgent task to migrate the greenhouse effect.Among the technologies for NF3 abatement,the destructive sorption of NF3 over metal oxides sor-bents is an effective way.Thus,the search for a highly reactive and utilized sorbent for NF3 destruction is in great demand.In this work,AlOOH supported on carbon-sphere(AlOOH/CS)as precursors were syn-thesized hydrothermally and heat-treated to prepare the Al2O3 sorbents.The influence of AlOOH/CS hydrothermal temperatures on the reactivity of derived Al2O3 sorbents for NF3 destruction was investi-gated,and it is shown that the Al2O3 from AlOOH/CS hydro-thermalized at 120 ℃ is superior to others.Subsequently,the optimized Al2O3 was covered by Mn(OH)x to prepare Mn/Al2O3 sorbents via changing hydrothermal temperatures and Mn loadings.The results show that the Mn/Al2O3 sorbents are more uti-lized than bare Al2O3 in NF3 destructive sorption due to the promotional effect of Mn2O3 as surface layer on the fluorination of Al2O3 as substrate,especially the optimal 5％Mn/Al2O3(160 ℃)exhibits a utilization percentage as high as 90.4％,and remarkably exceeds all the sorbents reported so far.These findings are beneficial to develop more efficient sorbents for the destruction of NF3.
NETL
NSTL
万方数据