Effects of Pulsed Arc Ion Plating Process Parameters on Structure and Resistance of Zinc Oxide Piezoelectric Coating
In order to provide a scientific reference and basis for exploring and enhancing the fabrication process of ZnO piezoelectric thin films, nanoscale ZnO piezoelectric coatings with strong adhesion were deposited on stainless steel substrates using the pulsed arc ion plating method. The effects of two critical fabrication process parameters, namely working gas pressure and target-to-substrate distance, on the crystal structure and electrical resistance properties of the ZnO piezoelectric sensor coatings were systematically studied. Results showed that a reduc-tion in working gas pressure led to an improvement in the crystallinity of the coatings. As target-to-substrate distance increased, the crystallinity first increased and then decreased, resulting in a decrease in resistance. These findings provided a scientific reference and basis for the applica-tion of new permanent thin-film pressure sensors (PMTS) in the pressure monitoring of high and ultra-high-voltage smart casings.
pulsed arc ion platingzinc oxidepiezoelectric sensorscrystal structureresistance
万方数据
维普
