Study on the Effects of Process Parameters on the Micro Properties of Ag Coatings Prepared by Magnetron Sputtering
In this study,the orthogonal experimental method was employed to investigate the effects of magnetron sputtering processes such as sputtering temperature,magnetron target power and sputtering time on the adhesion performance and hydrophobic properties of Ag coatings pre-pared by magnetron sputtering.The morphological evolution of Ag deposited coatings and the optimal forming parameters were summarized.The chemical composition of the coatings under the orthogonal experimental parameters was analyzed using energy-dispersive spectroscopy(EDS).Scanning electron microscopy(SEM)was utilized to examine the micromorphology of the coatings and infer the evolution process of their micro-structures.A scratch tester and contact angle measurement instrument were employed to characterize the adhesion strength between the coatings and the substrate as well as the hydrophobic performance of the coatings.Based on the above tests,a range analysis was performed on the or-thogonal experimental results to summarize the ranking of the influencing factors on coating performance indicators and to determine the optimal forming process parameters.The results indicated that the strength of influence of the factors was ranked as follows:Ag target sputtering power＞sputtering time＞sputtering temperature.The coating corresponding to parameter set S1(Ag target sputtering power of 10 W,sputtering time of 10 min and sputtering temperature of 150 ℃)exhibited the best performance,with the optimal coating thickness controlled in the range of 0.7～1.4 µm.The findings of this study provided a reference and analytical framework for the optimization of large-scale industrial production of joint prosthesis processes in the future.
orthogonal test methodmagnetron sputteringsliver coatingmicro properties
万方数据
维普
