首页|超细等轴状AlN粉体的燃烧合成制备及机理研究

超细等轴状AlN粉体的燃烧合成制备及机理研究

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超细等轴状AlN粉体因高烧结活性、良好的流动性和分散性,在电子封装、半导体等领域应用广泛,然而常规方法制备超细等轴状AlN粉体通常需要在高温下长时间保温,导致工艺成本较高,限制了其应用。本工作以Al粉和AlN粉为原料,采用高效低成本的燃烧合成工艺制备超细等轴状AlN粉体,系统研究了 AlN稀释剂比例和N2压力对燃烧温度、产物物相组成和微观结构的影响。结果表明,AlN稀释剂比例的增加和N2压力的降低都会导致燃烧温度的降低,进而有利于通过Al粉的原位氮化获得超细等轴状AlN粉体。当AlN稀释剂添加量为60%(摩尔分数)、N2压力为0。2 MPa时,成功制备了平均粒径约为1。5 μm的超细等轴状AlN粉体。此外,基于燃烧淬熄实验分析了超细等轴状AlN粉体的原位氮化生长机制。
Combustion Synthesis of Ultrafine Equal-axis AlN Powder and the Underlying Occurrences
Ultrafine equal-axis AlN powder has found wide application in the fields such as electronic packaging,semiconductor,etc.owing to its high sintering activity,and good fluidity and dispersibility.The preparation of equal-axis AlN powder through conventional methods nevertheless usually requires long soaking time at high temperatures,resulting in high cost and therefore limiting its application.The present work made a satis-fying attempt to prepare ultrafine equal-axis AlN powder via a high-efficiency and low-cost combustion synthesis process using Al and AlN powders as raw materials,and systematically studied the effects of AlN diluent dosage and N2 pressure on the combustion temperature and the products'phase composition and microstructure.The results showed that both the increase in AlN diluent dosage and the decrease in N2 pressure led to the reduction of combustion temperature,which was conducive to the in-situ nitriding of Al powder to obtain ultrafine equal-axis AlN powder.By adop-ting an AlN dosage of 60mol%and a N2 pressure of 0.2 Mpa,the equal-axis AlN powder with an average particle size of 1.5 μm was obtained.Furthermore,the underlying occurrences during the in-situ nitriding growth of equal-axis AlN powder were revealed by the gas-releasing assisted quenching experiments.

combustion synthesisaluminum nitridepowdergrowth mechanism

李明新、魏智磊、张彪、赵蕾、史忠旗

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西安交通大学材料科学与工程学院金属材料强度国家重点实验室,西安 710049

燃烧合成 氮化铝 粉体 生长机制

2025

材料导报
重庆西南信息有限公司

材料导报

北大核心
影响因子:0.605
ISSN:1005-023X
年,卷(期):2025.39(1)