基于磁控溅射的Pt/PtRh高温薄膜热电偶传感器集成工艺

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中文摘要：Pt/PtRh为高温薄膜热电偶敏感材料,Al2O3和SiO2为复合绝缘层材料,采用磁控溅射法成功制备Pt/PtRh薄膜热电偶及Al2O3/SiO2复合型上下绝缘层,并通过掩膜-沉积法实现薄膜热电偶图案化制备.结果表明:制备的复合绝缘层Al2O3/SiO2能够有效保证高温薄膜热电偶传感器在1200℃高温下的绝缘性和化学稳定性.Pt/PtRh热电偶阵列精度达到200μm,可在1200℃下稳定工作超过2200 min,经过4000 min升降温循环测试后,热电偶输出热电动势偏差小于1％.热电偶传感器整体厚度小于20μm,集成于合金与热障涂层之间的热电偶在高温服役环境下可稳定工作并测量合金表面温度.多层结构的样件在服役测试中无分层、脱落现象,热电偶稳定输出信号.

外文标题：Integration technique of Pt/PtRh high-temperature thin film thermocouple sensors fabricated via magnetron sputtering

外文摘要：The high-temperature thermocouple sensors were fabricated via magnetron sputtering,and the thermocouple patterns were prepared by using mask deposition,the sensing materials of thermocouples were Pt and PtRh,and the insulating layers were Al2O3 and SiO2.The results show that insulating layers Al2O3/SiO2 are able to ensure the electrical insulation and stability of the sensors at 1200 ℃.The precision of Pt/PtRh thermocouples reaches 200 μm,and the thermocouples can work under 1200 ℃ for 2200 min.After a 4000 min-cycling tests,the output voltage deviation is less than 1％.The thickness of whole thermocouple sensor is less than 20 μm,and can be integrated between the alloy and the thermal barrier to measure the temperature of the alloy surface.The multilayered structure exhibits stable signal output without delamination and separation during the service test.

外文关键词：

high-temperature thin film thermocouplePt/PtRh thermocoupleSeebeck effectaluminum oxide insulating layersilica insulating layer

作者：

张文琦、沈统、王林斌、赵未昀、邓元

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作者单位：

北京航空航天大学杭州创新研究院浙江省智能传感材料与芯片集成技术重点实验室,杭州 310052

北京航空航天大学前沿科学技术创新研究院,北京 100083

关键词：

高温薄膜热电偶铂-铂铑热电偶塞贝克效应氧化铝绝缘层氧化硅绝缘层

基金：

国家科技重大专项浙江省重点研发计划浙江省领军型创新创业团队项目国家自然科学基金

项目编号：

J2019-Ⅶ-0008-01482021C050022020R0100752102202

出版年：

2024

DOI：

10.11868/j.issn.1001-4381.2023.000496

材料工程

中国航发北京航空材料研究院

材料工程

CSTPCD北大核心

影响因子：0.78

ISSN：1001-4381

年,卷(期)：2024.52(9)