Phase structure of sputtered Ta coating and its ablation behavior by laser pulse heating (LPH)

Yunsong Niu ¹Lingling Xing ²Feng Yang ³Huawei Li ²Minghui Chen ⁴Shenglong Zhu ¹Fuhui Wang⁴

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作者信息

1. Corrosion and Protection Division, Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences,Shenyang, 110016, China
2. College of Chemistry and Chemical Engineering, Shenyang Normal University, Shenyang, 110034, China
3. School of Equipment Engineering, Shenyang Ligong University, Shenyang, 110159, China
4. Corrosion and Protection Division, Shenyang National Laboratory for Materials Science, Northeastern University, Shenyang, 110819, China
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Abstract

Phase structure of sputtered Ta coating in the negative glow space and LPH effect were explored.The whole coating/substrate system is substrate → physically gas-absorbed Fe surface → oxygen-enriched TaOx layer → amorphous Ta → α and β dual phase → single α phase.After LPH course,microstructure of Ta coating shows intact,only a few cracks emerge after 100 laser pulses,exhibiting thin HAZ but thick Fe/Ta ICZ,without martensitic transformation.For the electrodeposited Cr coating,continuous thermal stresses produce many extra micro-crack,substrate oxidation and martensitic transformation,leading to crack propagations and final bulk delamination,without any ICZ.

Key words

Sputtered Ta coating/Phase structure/Laser pulse heating/Inter-connected zone (ICZ)/Heat-affected zone (HAZ)/Ablation

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基金项目

出版年

2021

材料科学技术(英文版)

中国金属学会中国材料研究学会中国科学院金属研究所

材料科学技术(英文版)

CSTPCDCSCDSCI

影响因子：0.657

ISSN：1005-0302

参考文献量66

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