Mechanical properties and deformation mechanisms of surface-modified 6H-silicon carbide
Zhonghuai Wu 1Liangchi Zhang2
作者信息
- 1. Laboratory for Precision and Nano Processing Technologies,School of Mechanical and Manufacturing Engineering,University of New South Wales,NSW 2052,Australia
- 2. Shenzhen Key Laboratory of Cross-Scale Manufacturing Mechanics,Southern University of Science and Technology,Shenzhen,Guangdong 518055,China;Department of Mechanics and Aerospace Engineering,Southern University of Science and Technology,Shenzhen,Guangdong 518055,China
- 折叠
Abstract
The effect of amorphous film on the deformation mechanism and mechanical properties of 6H-SiC were systematically explored by a combination of both experiments and molecular dynamic (MD) simulations in nanoindentation.The experimental results showed that the plastic deformation of surface-modified 6H-SiC is mainly accommodated by dislocation activities in the subsurface and an amorphous layer with uniform thickness.The MD results indicated that the amorphous layer on the surface of the residual indentation mark consists of both amorphous SiO2 and SiC due to direct amorphization.In addition,the amorphous SiO2 film undergoes densification and then ruptures with the indentation depth increases.The modulus and hardness increase with increasing the indentation depth at the initial stage but will reach their stable values equivalent to monocrystalline 6H-SiC.
Key words
Nanoindentation/Surface-modified 6H-SiC/Amorphous SiO2 film/Amorphization/Dislocation evolution/MD simulation引用本文复制引用
基金项目
Guangdong Spe-cific Discipline Project(2020ZDZX2006)
Shenzhen Key Laboratory of Cross-scale Manufacturing Mechanics Project(ZDSYS20200810171201007)
NCI National Facility systems through the National Computational Merit Allocation Scheme supported by the Australian Governm()
出版年
2021
NETL
NSTL
维普
万方数据