材料科学技术(英文版)2021，Vol.95Issue(36) ：10-19.

In-situ revealing the degradation mechanisms of Pt film over 1000 ℃

Dongfeng Ma Shengcheng Mao Jiao Teng Xinliang Wang Xiaochen Li Jin Ning Zhipeng Li Qing Zhang Zhiyong Tian Menglong Wang Ze Zhang Xiaodong Han
材料科学技术(英文版)2021，Vol.95Issue(36) ：10-19.
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In-situ revealing the degradation mechanisms of Pt film over 1000 ℃

Dongfeng Ma 1Shengcheng Mao 1Jiao Teng 2Xinliang Wang 3Xiaochen Li 1Jin Ning 4Zhipeng Li 1Qing Zhang 1Zhiyong Tian 1Menglong Wang 1Ze Zhang 5Xiaodong Han1
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作者信息

  • 1. Beijing Key Lab of Microstructure and Property of Advanced Materials,Faculty of Materials and Manufacturing,Beijing University of Technology,Beijing 100124,China
  • 2. Department of Material Physics and Chemistry,University of Science and Technology Beijing,Beijing 100083,China
  • 3. YW MEMS(Suzhou)CO.,LTD,Suzhou 215123,China
  • 4. Research Center of Engineering for Semiconductor Integrated Technology,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
  • 5. Beijing Key Lab of Microstructure and Property of Advanced Materials,Faculty of Materials and Manufacturing,Beijing University of Technology,Beijing 100124,China;State Key Laboratory of Silicon Materials and Department of Materials Science and Engineering,Zhejiang University,Hangzhou 310008,China
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Abstract

Degradation of a metallic film under harsh thermal-mechanical-electrical coupling field conditions deter-mines its service temperature and lifetime.In this work,the self-heating degradation behaviors of Pt thin films above 1000 ℃ were studied in situ by TEM at the nanoscale.The Pt films degraded mainly through void nucleation and growth on the Pt-SiNx interface.Voids preferentially formed at the grain boundary and triple junction intersections with the interface.At temperatures above 1040 ℃,the voids nucleated at both the grain boundaries and inside the Pt grains.A stress simulation of the suspended membrane suggests the existence of local tensile stress in the Pt film,which promotes the nucleation of voids at the Pt-SiNx interface.The grain-boundary-dominated mass transportation renders the voids grow preferen-tially at GBs and triple junctions in a Pt film.Additionally,under the influence of an applied current,the voids that nucleated inside Pt grains grew to a large size and accelerated the degradation of the Pt film.

Key words

Platinum/In situ transmission electron microscopy/(TEM)/Thin film/Void growth/Degradation

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基金项目

Basic Science Center Program for Multiphase Evolution in Hyper-gravity of the National Natural Science Foundation of China(51988101)

NSFC Programs(52071003)

NSFC Programs(91860202)

NSFC Programs(11604006)

Beijing Municipal Ed-ucation Commission Project(PXM2020014204000021)

Beijing Municipal Ed-ucation Commission Project(PXM201901420400032)

Beijing Outstanding Young Scien-tists Projects(BJJWZYJH01201910005018)

Beijing Natural Science Foundation(Z180014)

"111"Project(DB18015)

出版年

2021
材料科学技术(英文版)
中国金属学会 中国材料研究学会 中国科学院金属研究所

材料科学技术(英文版)

CSTPCDCSCDSCI
影响因子：0.657
ISSN：1005-0302
参考文献量67
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