材料科学技术(英文版)2022，Vol.107Issue(12) ：172-182.

Tailoring the microstructure,mechanical and tribocorrosion performance of(CrNbTiAlV)Nx high-entropy nitride films by controlling nitrogen flow

Cunxiu Zhang Xiaolong Lu Cong Wang Xudong Sui Yanfang Wang Haibin Zhou Junying Hao
材料科学技术(英文版)2022，Vol.107Issue(12) ：172-182.
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Tailoring the microstructure,mechanical and tribocorrosion performance of(CrNbTiAlV)Nx high-entropy nitride films by controlling nitrogen flow

Cunxiu Zhang 1Xiaolong Lu 2Cong Wang 3Xudong Sui 4Yanfang Wang 5Haibin Zhou 2Junying Hao3
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作者信息

  • 1. State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou 730000,China;School of Materials Science and Engineering,China University of Petroleum(East China),Qingdao 266580,China
  • 2. State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou 730000,China;Qingdao Center of Resource Chemistry and New Materials,Qingdao 266000,China
  • 3. State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou 730000,China;Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China
  • 4. State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou 730000,China;Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China;Qingdao Center of Resource Chemistry and New Materials,Qingdao 266000,China
  • 5. School of Materials Science and Engineering,China University of Petroleum(East China),Qingdao 266580,China
  • 折叠

Abstract

The(CrNbTiAlV)Nx high-entropy nitride films were fabricated by adjusting nitrogen flow via magnetron sputtering.The microstructure,mechanical,electrochemical and tribocorrosion performances of the films were studied.The results show that the films transform from amorphous to nanocrystalline structure as nitrogen flow increased.The nanocrystalline films show super hardness(＞40 GPa)and adhesion strength(＞50 N).The amorphous film has a pretty anti-corrosion in static corrosion,while not in tribocorrosion condition.The film deposited at nitrogen flow of 38 sccm exhibits the optimal tribocorrosion performance in artificial seawater,with the highest open circuit potential(～-0.1 V vs.Ag/AgCl),the lowest friction coefficient(～0.162)and wear rate(～7.48×10-7 mm3 N-1 m-1).

Key words

High-entropy nitride films/Nitrogen flow/Tribocorrosion performance/Magnetron sputtering

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基金项目

financial support of the National Natural Science Foundation of China(51835012)

financial support of the National Natural Science Foundation of China(51975554)

National Key R&D Plan of China(2018YFB0703803)

program ofScience&Technology Interna-tional Cooperation Demonstrative Base of Metal Surface Engineer-ing along the Silk Road(2017D01003)

出版年

2022
材料科学技术(英文版)
中国金属学会 中国材料研究学会 中国科学院金属研究所

材料科学技术(英文版)

CSTPCDCSCDSCI
影响因子：0.657
ISSN：1005-0302
参考文献量60
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