首页|Synergistically enhanced Si3N4/Cu heterostructure bonding by laser surface modification

Synergistically enhanced Si3N4/Cu heterostructure bonding by laser surface modification

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A bonding approach based on laser surface modification was developed to address the poor bonding be-tween Si3N4 ceramic and Cu.The bonding mechanism in Si3N4/Cu heterogeneous composite structure fabricated by laser modification-assisted bonding is examined by means of scanning/transmission elec-tron microscopy and thermodynamic analysis.In the bonding process under laser modification,atomic intermixing at the interface is confirmed,as a result of the enhanced diffusion assisted by the dissocia-tion of Si3N4 ceramic by laser.The dissociating Si precipitations on the surface,as well as the formation of micro-pores interfacial structure,would be the key concept of the bonding,by which the seamless and robust heterointerfaces were created.By controlling the laser-modifying conditions,we can obtain a reli-able heterostructure via the optimization of the trade-off of the surface structure and bonding strength,as determined by the laser-modified surface prior to bonding.The maximum structure depth and S ratio at the Si3N4 surface were produced at a laser power of 56 W,corresponding to the maximal shear strength of 15.26 MPa.It is believed that the further development of this bonding technology will advance power electronic substrate fabrication applied in high-power devices.

Silicon nitrideLaser surface modificationInterfacial microstructureAnalytical modelingMechanical properties

Yanyu Song、Haitao Zhu、Duo Liu、Xiaoguo Song、Hong Bian、Wei Fu、Danyang Lin、Caiwang Tan、Jian Cao

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State Key Laboratory of Advanced Welding and Joining,Harbin Institute of Technology,Harbin 150001,China

Shandong Provincial Key Lab of Special Welding Technology,Harbin Institute of Technology at Weihai,Weihai 264209,China

Shandong Institute of Shipbuilding Technology,Harbin Institute of Technology at Weihai,Weihai 264209,China

国家自然科学基金国家自然科学基金Taishan Scholars Foundation of Shandong Province山东省自然科学基金山东省自然科学基金China Academy of Space Technology Innovation Foundation

5227531852175307tsqn201812128ZR2023JQ021ZR2023QE221CAST2022

2024

10.1016/j.jmst.2023.10.014

材料科学技术(英文版)
中国金属学会 中国材料研究学会 中国科学院金属研究所

材料科学技术(英文版)

CSTPCD
影响因子：0.657
ISSN：1005-0302
年,卷(期)：2024.182(15)
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