使用正交排列的电容式传感单元的三维电场传感器(Three-dimensional electric field sensor,3D EFS)测量空间电场时,轴间耦合效应会严重影响EFS的测量精度.为此,提出了一种电场屏蔽电极,以降低3D EFS的轴间耦合效应,提高测量精度.首先,利用多物理场仿真软件构建电场分布模型.其次,根据仿真结果建立带屏蔽电极的3D EFS电容式传感单元的屏蔽电极模型.最后,建立任意角度的测试平台,将带有屏蔽电极的3D EFS和无屏蔽电极的3D EFS进行实验对比.结果显示,有屏蔽电极的3D EFS的测量偏差在3.2％以内,比无屏蔽电极的3D EFS的测量偏差减少12％.因此,所设计的基于电场屏蔽结构的3D EFS可以使解耦矩阵更加可靠,有效降低空间电场测量偏差.
Three-dimensional electric field sensor with low inter-axis coupling
When three-dimensional electric field sensor(3D EFS) with orthogonally arranged capacitive-type sensing units is used to measure space electric fields, measurement accuracy is liable to be affected by the coupling effect between axes. In this study, an electric field shielding electrode was proposed to reduce the interaxial coupling effect in 3D EFS and improve the measurement accuracy. Firstly, the multiphysics field simulation software was used to construct an electric field model. Then, the capacitive-type sensing units of the 3D EFS with shielding electrode was developed by simulation results. Finally, an arbitrary angle test platform was set up to experimentally test the 3D EFS with shielding electrodes and the 3D EFS without shielding electrodes. The experimental results showed the measurement deviation of the 3D EFS with shielding electrodes was within 3.2％, which was 12％ lower than that of the 3D EFS without shielding electrodes. It can be concluded that the 3D EFS based on the electric field shielding structure can make the decoupling matrix more reliable and reduce the measurement deviation of space electric field.
capacitive-type electric field sensor(EFS)3D electric fieldsimulation analysisinter-axis couplingelectric field shielding
万方数据
维普
