This paper reviews the manufacturing difficulties of decimal quantum resistor arrays and their applications and prospects in electrical metrology standardization.By analyzing the core principles of the quantum Hall effect,the advantages and differences of gallium arsenide(GaAs)and graphene in quantum resistor arrays are discussed.This paper summarizes the key technologies for achieving decimal quantization,including the preparation of quantum Hall bars,carrier density regulation,superconducting interconnection and circuit error optimization.In addition,this pa-per also emphasizes the important role of quantum resistor arrays in the international metrology system,especially its contribution to the redefinition of ohms and amperes,and looks forward to the development trend of portability and in-telligence of quantum resistor devices,which can not only promote the advancement of electrical measurement tech-nology,but also provide important technical support for various high-precision measurement applications.
关键词
十进制量子电阻阵列/量子霍尔效应/砷化镓/石墨烯/电学计量标准化
Key words
decimal quantum resistor array/quantum Hall effect/gallium arsenide/graphene/electrical metrology standardization