Energy efficiency analysis of copper electroplating employing acidic cuprous solution
In order to reduce the electricity consumption in copper electroplating, energy efficiency and electrochemical processes of the acidic cuprous solution were analyzed by polarization curve measure-ment, Hull cell test, observation of cell voltage, and scanning electron microscopy. On the cathode, Cu+ is prior to be reduced. Additionally, the cathodic current efficiency is higher than 92％ and increas-es with the cathodic current density. When the cathodic current density is not higher than 4.0 A·dm-2, the prepared copper films show excellent apparent condition and morphology. On the copper anode, me-tallic Cu is prior to be oxidized. Therefore, the anodic current efficiency is above 94％ and increases with the anodic current density. Moreover, the anode will be passivated, resulting in a dramatic in-crease of bath voltage. However, employing a large anode and a small cathode can lower the bath volt-age, and match the current efficiencies of anode and cathode.
copper electroplatingcuprouscurrent efficiencypassivationbath voltage
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维普
