In order to reduce the electricity consumption in copper electroplating, energy efficiency and electrochemical processes of the acidic cuprous solution were analyzed by polarization curve measure-ment, Hull cell test, observation of cell voltage, and scanning electron microscopy. On the cathode, Cu+ is prior to be reduced. Additionally, the cathodic current efficiency is higher than 92％ and increas-es with the cathodic current density. When the cathodic current density is not higher than 4.0 A·dm-2, the prepared copper films show excellent apparent condition and morphology. On the copper anode, me-tallic Cu is prior to be oxidized. Therefore, the anodic current efficiency is above 94％ and increases with the anodic current density. Moreover, the anode will be passivated, resulting in a dramatic in-crease of bath voltage. However, employing a large anode and a small cathode can lower the bath volt-age, and match the current efficiencies of anode and cathode.
关键词
电镀铜/一价铜/电流效率/钝化/槽压
Key words
copper electroplating/cuprous/current efficiency/passivation/bath voltage
维普
万方数据