The inflation process of parachute is the most critical step during the landing of the Mars probe. The model of computational fluid dynamics ( CFD ) and structural dynamics was built,considering low atmospheric-density and supersonic flow. The flow field was solved by using compressible flow-field model,and the structural dynamics was analyzed by using multi-node mass damped spring model of parachute system. The flow-field of the parachute was calculated,and the pressure field of canopy surface for the previous time step was imported to the multi-node mass damped spring model of parachute system. The canopy shape of the next time step was obtained,and the parachute shape and the flow field were obtained during the opening process. The test results and calculation results were analyzed comparatively,and the parachute inflation process was simulated under this condition. The numerical results are well consistent with the experiential results,so the mathematical model used is reliable. The results show that there is obvious vibration after the parachute-opening dynamic-load reaches the peak value,and the vibration frequency is only related to its own characteristics;the speed of the canopy opening is slow at first and then fast;under the same initial-speed,the peak value of the parachute-opening dynamic-load increases with the increase of atmospheric density;under the same initial dynamic-pressure,the peak value of the parachute-opening dynamic-load decreases with the increase of atmospheric density.