基于超快激光定域去除的Cu/Ag复合金属网格透明电极性能优化研究
Study on performance optimization of transparent Cu/Ag composite metal mesh electrode based on localized removal with ultrafast laser
王轶伦 1李双双 2李保家3
作者信息
- 1. 常州大学机械与轨道交通学院,江苏 常州 213164;江苏大学机械工程学院,江苏 镇江 212013;新誉集团有限公司,江苏 常州 213166
- 2. 江苏大学机械工程学院,江苏 镇江 212013;常州工程职业技术学院智能制造学院,江苏 常州 213164
- 3. 江苏大学材料科学与工程学院,江苏 镇江 212013
- 折叠
摘要
[目的]Ag网格透明电极方块电阻低,但反射率高.[方法]在钠钙玻璃基底表面利用等离子射频磁控溅射沉积Cu/Ag复合金属薄膜,然后采用飞秒脉冲激光定域去除金属层,获得 Cu/Ag 复合金属网格透明电极.分析了激光能量密度、激光扫描速率和激光扫描线重叠率对电极材料去除的影响机制.[结果]在激光能量密度1.4 J/cm2、激光扫描速率300 mm/s和激光扫描线重叠率70%的工艺参数下获得了综合光电性能最为出色的Cu/Ag复合金属网格透明电极,其平均透光率为87.58%,方块电阻为2.15 Ω,品质因子为1.235×10-1 Ω-1.[结论]该电极的综合性能与传统商用ITO(掺锡氧化铟)透明电极相比有巨大提升.
Abstract
[Introduction]The transparent Ag mesh electrode has low sheet resistance but high reflectivity.[Method]A Cu/Ag composite metal film was deposited on the surface of soda-lime glass by plasma radio frequency(RF)magnetron sputtering,and then locally removed by femtosecond pulsed laser,forming a transparent Cu/Ag composite metal mesh electrode.The effects of laser fluence,laser scanning speed,and laser scanning line overlap ratio on the removal of electrode material were discussed.[Result]The transparent Cu/Ag composite metal mesh electrode fabricated at laser fluence 1.4 J/cm2,laser scanning speed 300 mm/s,and laser scanning line overlap ratio 70%exhibited an average optical transmittance of 87.58%,a sheet resistance of 2.15 Ω,and a figure of merit of 1.235×10-1 Ω-1,showing the best photoelectric properties.[Conclusion]The comprehensive performance of the transparent Cu/Ag composite metal mesh electrode is much better than that of the commercial ITO(indium tin oxide)transparent electrode.
关键词
金属网格/超快激光/定域去除/透明电极/光电性能Key words
metal mesh/ultrafast laser/localization removal/transparent electrode/photoelectric property引用本文复制引用
基金项目
常州大学科研启动经费项目(ZMF21020357)
出版年
2024
NETL
NSTL
万方数据