Study on performance optimization of transparent Cu/Ag composite metal mesh electrode based on localized removal with ultrafast laser
[Introduction]The transparent Ag mesh electrode has low sheet resistance but high reflectivity.[Method]A Cu/Ag composite metal film was deposited on the surface of soda-lime glass by plasma radio frequency(RF)magnetron sputtering,and then locally removed by femtosecond pulsed laser,forming a transparent Cu/Ag composite metal mesh electrode.The effects of laser fluence,laser scanning speed,and laser scanning line overlap ratio on the removal of electrode material were discussed.[Result]The transparent Cu/Ag composite metal mesh electrode fabricated at laser fluence 1.4 J/cm2,laser scanning speed 300 mm/s,and laser scanning line overlap ratio 70%exhibited an average optical transmittance of 87.58%,a sheet resistance of 2.15 Ω,and a figure of merit of 1.235×10-1 Ω-1,showing the best photoelectric properties.[Conclusion]The comprehensive performance of the transparent Cu/Ag composite metal mesh electrode is much better than that of the commercial ITO(indium tin oxide)transparent electrode.
metal meshultrafast laserlocalization removaltransparent electrodephotoelectric property
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