首页|真空镀膜设备收放系统用多电机协同控制分析

真空镀膜设备收放系统用多电机协同控制分析

扫码查看
为改善真空镀膜设备多电机协同控制系统的稳定性与协同性,将自抗扰控制应用于电机调速控制系统,并与传统PI控制进行对比分析,验证了其较强的抗干扰能力.基于自抗扰控制,针对外界扰动下多台电机间转速同步误差较大问题,提出一种改进型偏差耦合控制的速度补偿器,其与传统方式相比,多电机间同步误差减小39.22%,恢复时间缩短75%,真空镀膜设备张力波动降低57.78%.
Analysis of Multi-motor Cooperative Control for Push-Pull Systems of Vacuum Coating Apparatuses
In order to improve the stability and synergism of multi-motor cooperative control system for vacuum coating apparatus,this paper applies ADRC to the motor speed control system,and carries out a comparative analysis with the conventional PI control,and verifies that the ADRC has a strong disturbance-tolerant ability.Based on the ADRC,in view of large synchronization error among multiple motors speed under external disturbances,this paper puts forward an im-proved deviation coupling control speed compensator,which can achieve 39.22%,75%,and 57.78%reduction in synchro-nization error among multiple motors,recovery time,and vacuum coating tension fluctuation,respectively,compared with conventional speed compensation.

multi-motor cooperative controlpush-pull systemADRCdeviation coupling controlvacuum coating appa-ratus

刘长林、陆艳君、安辉、田玉宝、邓文宇、齐丽君、安跃军

展开 >

沈阳工业大学电气工程学院,辽宁沈阳 110870

沈阳芯源微电子设备股份有限公司,辽宁沈阳 110168

沈阳中北通磁科技股份有限公司,辽宁沈阳 110159

多电机协同控制 收放系统 自抗扰控制 偏差耦合控制 真空镀膜设备

2024

电工技术
重庆西南信息有限公司(原科技部西南信息中心)

电工技术

影响因子:0.177
ISSN:1002-1388
年,卷(期):2024.(18)