真空镀膜设备收放系统用多电机协同控制分析
Analysis of Multi-motor Cooperative Control for Push-Pull Systems of Vacuum Coating Apparatuses
刘长林 1陆艳君 2安辉 1田玉宝 1邓文宇 3齐丽君 3安跃军1
作者信息
- 1. 沈阳工业大学电气工程学院,辽宁沈阳 110870
- 2. 沈阳芯源微电子设备股份有限公司,辽宁沈阳 110168
- 3. 沈阳中北通磁科技股份有限公司,辽宁沈阳 110159
- 折叠
摘要
为改善真空镀膜设备多电机协同控制系统的稳定性与协同性,将自抗扰控制应用于电机调速控制系统,并与传统PI控制进行对比分析,验证了其较强的抗干扰能力.基于自抗扰控制,针对外界扰动下多台电机间转速同步误差较大问题,提出一种改进型偏差耦合控制的速度补偿器,其与传统方式相比,多电机间同步误差减小39.22％,恢复时间缩短75％,真空镀膜设备张力波动降低57.78％.
Abstract
In order to improve the stability and synergism of multi-motor cooperative control system for vacuum coating apparatus,this paper applies ADRC to the motor speed control system,and carries out a comparative analysis with the conventional PI control,and verifies that the ADRC has a strong disturbance-tolerant ability.Based on the ADRC,in view of large synchronization error among multiple motors speed under external disturbances,this paper puts forward an im-proved deviation coupling control speed compensator,which can achieve 39.22％,75％,and 57.78％reduction in synchro-nization error among multiple motors,recovery time,and vacuum coating tension fluctuation,respectively,compared with conventional speed compensation.
关键词
多电机协同控制/收放系统/自抗扰控制/偏差耦合控制/真空镀膜设备Key words
multi-motor cooperative control/push-pull system/ADRC/deviation coupling control/vacuum coating appa-ratus引用本文复制引用
出版年
2024
NETL
NSTL
万方数据