Levitated optomechanical systems with excellent sensitivity,high stability and low dissi-pation are expected to become new high-performance mechanical sensors.But current feedback controllers for levitated optomechanical systems have issues of poor compatibility,high cost and low integration.A hardware-software scheme compatible with multiple feedback control modes is showed here.And a highly integrated feedback controller is developed,which contains six-channel ana-log-to-digital/digital-to-analog converters,filters,field programmable gate array+advanced RISC machine(FPGA+ARM)and other functional modules with the size of 160 mm×170 mm×42 mm,and a control algorithm is proposed based on digital phase-locked loop and proportional integral deriva-tive(PID)controller.And thus the motion demodulation and feedback control of multi-sized particles are realized with this controller,as well as the sensing bandwidth of which is from tens of hertz to sub-megahertz.The experimental results demonstrate stable suspension and motion control of submicron-sized and micrometer-sized particles in ultra-high vacuum(10-6 Pa).With a higher sensing bandwidth and a smaller size,the integrated feedback controller offers a route for instrumented levitated optomechanical sensing technology.
维普
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