In response to the machining errors in the manufacturing process of hemispherical re-sonator gyroscopes,finite element simulation is used to analyze the effects of structural parame-ters,dimensional tolerances,and geometric tolerances on the working mode frequency and adjacent mode frequency of the hemispherical resonator.The effects of positional tolerances on fre-quency splitting and quality factor are studied.Through simulation analysis,it can be concluded that the structural parameters of the hemispherical resonator,such as wall thickness,hemispher-ical center radius,and internal chamfer radius,all affect the mode frequency;the distance error between the inner and outer spherical centers in geometric tolerance of the hemispherical resonator has a significant impact on the working mode of the hemispherical resonator,and the parallel error of the central axis of the hemispherical resonator has a significant impact on frequency splitting and quality factor;the variation in wall thickness,inner chamfer radius,small column radius,and dis-tance between inner and outer spherical centers of the hemispherical resonator results in interfer-ence between the working mode frequency and adjacent modes.On this basis,optimization design suggestions for the structural parameters and geometric tolerances of the hemispherical resonator are proposed,and these suggestions are verified through quality factor Q values and frequency splitting measurements of the hemispherical resonator.
Geometric tolerancesFinite element simulationHemispherical harmonic oscillatorMode frequencyFrequency splittingQuality factor
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