摘要
为实现高精度的光学玻璃零件的加工,本文对进动气囊抛光关键技术进行了详细研究.首先介绍了进动气囊抛光设备及原理,通过对Preston方程的分析及工艺参数实验确定了抛光去除函数,并对驻留时间算法进行优化求解,通过MATLAB仿真验证残余误差在0.1 μm以内,最后对平面和球面玻璃进行了抛光实验,获得了面形PV值为0.18μm的球面表面,验证了驻留时间算法的合理性,满足光学玻璃元件精密加工的基本要求,为后续进行自由曲面的抛光提供了理论基础.
Abstract
The key technology in precession bonnet polishing is investigated to get the high-precision optical surface.First,we introduce the facility and principium of precession bonnet polishing.And the removal function of precession bonnet polishing is acquired from the analysis of Preston and the process experiments.Then the dwell time function is acquired to make it convenient to the polishing.The simulation of the variance of the residual error is made through MATLAB to prove the solution.The simulation results show that the residual error can reach up to 0.1μm.Finally,the polishing experiments of plane and sphere are made.After polishing the sphere surface PV value reaches 0.18tm.The rationality of the dwell time algorithm is proved and it can satisfy the requirement of optical precision machining very well.And this also provids theoretic foundation for the later polishing of free-form surface.
基金项目
武器装备预研基金资助项目(9140A18020307HK1301)
NETL
NSTL
维普
万方数据