Review of Research on Modal Matching Technology for Silicon MEMS Gyroscopes
Silicon MEMS gyroscopes have the advantages of small size and low cost,and are widely used in various fields.However,due to limitations in processing technology and environmental factors,the actual generated gyroscopes have the problem of mode mismatch,which affects the overall performance of the gyroscopes.To address the performance defects of silicon MEMS gyroscope caused by manufacturing defects,modal matching technology is an essential technical means to resolve modal mismatch,and improve the mechanical sensitivity and signal-to-noise ratio.Firstly,the basic work-ing principle of silicon MEMS gyroscopes and the advantages of modal matching are described.Then,the main methods of frequency tuning are summarized,including stiffness tuning and mass tuning,among which electrostatic tuning is the most widely used.Finally,the development status of modal matching is investigated and classified.The key problem is to deter-mine the criterion of modal matching and providing the modal frequency control quantity.Moreover,the technology of real-time automatic modal matching has great research value because of it can improve the temperature drift of frequency differ-ence and enhance the stability of gyroscope.
silicon MEMS gyroscopemodal matchingdevelopment status
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