The Performance Improvement of Thin Film Bulk Acoustic Resonators by Frame Structure
The effect of frame on the performance improvement of thin film bulk acoustic resonator(FBAR)is stud-ied.Based on the basic theory of reflection and matching of two kinds of frame structures to keep acoustic energy,accord-ing to their functional characteristics,several groups of frame microstructure combinations of low frequency and high fre-quency are determined experimentally,and the two groups of FBAR are taped out.Finally,the resonator of all groups is ob-tained by on-wafer test.The selected frame structure group can improve the performance of both low-frequency and high-frequency FBAR.For low frequency(around 1.7 GHz)FBAR,the quality factor of parallel resonance can be increased by more than 1 000.For high frequency(around 5.5 GHz)FBAR,the quality factor of parallel resonance can be increased by more than 300.For the high frequency FBAR with strong transverse parasitic mode,the optimized frame structure can im-prove the transverse parasitic suppression and reduce the impedance phase fluctuation under the series resonant frequency by more than 5°.
film bulk acoustic resonatorframe structuretaping out experimentimpedance phase fluctuation
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