Preparation of Micro Tool Electrodes by Bidirectional Pulse Liquid Membrane Method
A bidirectional pulsed liquid membrane electrochemical etching method was proposed to prepare tool electrodes efficiently,which can significantly improve the machining efficiency and reduce the diameter of spherical probes compared with unipolar pulse power supply.The effect of negative pulse voltage,positive pulse voltage and pulse period on the motion distribution of hydrogen bubbles and electrolytic products as well as the morphology of tool electrodes were investigated.It was found that the negative pulse voltage can significantly eliminate the influence of diffusion layers,make the current density distribution uniform and shorten the processing time.Under the conditions of electrolyte concentration of 0.5 mol/L,positive voltage of 3 V,negative voltage of-2 V,pulse period of 50 μs and duty cycle of 40%,a spherical electrode with a diameter of approximately 580 nm can be successfully prepared.
bipolar pulseelectrochemical etchingmicro tool electrodenegative pulse voltage
万方数据
维普
