考虑端部效应的动子无源型Halbach磁悬浮永磁直线电机电磁力分析
Electromagnetic force analysis of passive mover Halbach maglev permanent magnet linear synchronous motor considering end effects
张予希 1颜建虎 1池松 1周旭 1郭保成2
作者信息
- 1. 南京理工大学 自动化学院,江苏 南京 210094
- 2. 南京师范大学 电气与自动化工程学院,江苏 南京 210023
- 折叠
摘要
针对光刻机等高精确度定位平台无摩擦、无接触、无噪声需求,提出一种采用动子无源型平移和悬浮一体化Halbach磁悬浮永磁直线电机以实现定位平台的无摩擦悬浮及长距离定位运动.为了精确分析该类电机的悬浮力和推力特性,提出一种考虑动子永磁体端部效应的电机磁场解析模型并采用傅里叶分解法得到Halbach阵列永磁体磁场解析式.基于此磁场解析模型,通过洛伦兹力法得到了动子电磁力解析模型,并基于正交分解法推导了电机悬浮力和推力解耦的电磁力模型.结合有限元仿真对建立的电磁模型进行了对比验证,在此基础上,设计并制作了一台10 极12槽样机,通过搭建实验平台进行推力和悬浮力测试,将实验测试值与有限元仿真值和解析值对比验证了所提出方法的准确性和快速性.
Abstract
A passive mover Halbach maglev permanent magnet linear synchronous motor was to used a-chieve frictionless levitation and long-distance positioning motion of the positioning platform for high-pre-cision positioning platforms such as lithography.In order to accurately analyze the levitation and thrust characteristics of these motors,an analytical model of the magnetic field of the motor was proposed,tak-ing into account the end effect of the permanent magnets,and the Fourier decomposition method was used to obtain the analytical equation of the magnetic field.Based on this analytical model,the electromagnet-ic force was obtained by the Lorentz force method,and an electromagnetic force model based on the d-q decoupling was derived to decouple the suspension force and thrust force.Based on this,a 10-pole 12-slot prototype was designed and fabricated to test the thrust and suspension forces by building an ex-perimental platform.
关键词
永磁同步直线电机/磁悬浮/Halbach阵列/解析分析/端部效应/电磁力Key words
permanent magnet linear synchronous motor/maglev/Halbach array/analytical method/end effect/electromagnetic force引用本文复制引用
基金项目
国家自然科学基金青年基金项目(51907027)
出版年
2024
NETL
NSTL
万方数据