Electromagnetic force analysis of passive mover Halbach maglev permanent magnet linear synchronous motor considering end effects
A passive mover Halbach maglev permanent magnet linear synchronous motor was to used a-chieve frictionless levitation and long-distance positioning motion of the positioning platform for high-pre-cision positioning platforms such as lithography.In order to accurately analyze the levitation and thrust characteristics of these motors,an analytical model of the magnetic field of the motor was proposed,tak-ing into account the end effect of the permanent magnets,and the Fourier decomposition method was used to obtain the analytical equation of the magnetic field.Based on this analytical model,the electromagnet-ic force was obtained by the Lorentz force method,and an electromagnetic force model based on the d-q decoupling was derived to decouple the suspension force and thrust force.Based on this,a 10-pole 12-slot prototype was designed and fabricated to test the thrust and suspension forces by building an ex-perimental platform.
permanent magnet linear synchronous motormaglevHalbach arrayanalytical methodend effectelectromagnetic force